4-band*4096-element Schottky-barrier infrared linear image sensor

摘要

A multispectral linear array has been developed for remote-sensing applications in the short-wavelength (SW) infrared (IR) band. The device is a monolithic quadruple-band image sensor, consisting of 4096 detectors for each band. The SW-IR sensor uses silicon Schottky-barrier (SB) infrared charge-coupled-device (IRCCD) technology. Platinum silicide SB detectors are used. They operate at cryogenic temperature and respond to the short- and middle-wavelength infrared regions. The package for the SW-IRCCD has also been developed. The package has a SiC-Al/sub 2/O/sub 3/-SiC structure. The performance of the device has been measured, and the device can be used in spaceborne applications.