A standard-television compatible 648*487 pixel Schottky-barrier infrared CCD image sensor

摘要

Describes a 648*487 pixel PtSi Schottky-barrier infrared CCD image sensor. Due to the development of the modified inverted-LOCOS process, which can minimize dead regions, and the two-dopant concentration structure, which achieves both a large charge capability and high transfer efficiency, a 40% fill factor in a 21- mu m*21- mu m pixel and a 0.1-K noise equivalent temperature difference were obtained.