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Numerical Modeling and Electromagnetic Resonant Modes in Complex Grating Structures and Optoelectronic Device Applications

机译:复杂光栅结构中的数值建模和电磁谐振模式及光电器件的应用

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摘要

An extended surface impedance boundary condition algorithm is developed that allows for the optical properties of a wide variety of complex one-dimensional periodic grating structures to be modeled. Wood-Rayleigh anomalies, diffraction, and electromagnetic resonance modes including horizontally oriented surface plasmons and vertical surface resonances are identified and described as well as analyzing their structural and geometrical dependencies. Methods to combine these modes to produce hybrid modes that channel and localize light are described. Application of these modes to metal-semiconductor-metal photodetectors (MSM-PD) is discussed and an example silicon-based MSM-PD with over 30 GHz bandwidth and 0.3 AAV responsivity is described.
机译:开发了一种扩展的表面阻抗边界条件算法,该算法允许对各种复杂的一维周期性光栅结构的光学特性进行建模。识别并描述了Wood-Rayleigh异常,衍射和电磁共振模式,包括水平取向的表面等离子体激元和垂直表面共振,并分析了它们的结构和几何依赖性。描述了组合这些模式以产生引导和定位光的混合模式的方法。讨论了这些模式在金属-半导体-金属光电探测器(MSM-PD)中的应用,并描述了具有超过30 GHz带宽和0.3 AAV响应度的示例基于硅的MSM-PD。

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