Single-Crystalline Si STacked ARray (STAR) NAND Flash Memory

摘要

In this paper, a 3-D nand Flash memory array having multiple single-crystal Si nanowires is investigated. Device structure and fabrication process are described including the electrical isolation of stacked nanowires. Numerical simulation results focused on nand Flash memory operation are delivered. Devices and array with stacked bit lines are fabricated, and memory characteristics such as program/erase select gate operation are measured. Array scheme is also discussed for the high-density bit-cost scalable 3-D stacked bit-line nand Flash memory application.