Flexible Complementary Oxide Thin-Film Transistor-Based Inverter With High Gain

摘要

Wearable bio-sensing devices are considered promising for ubiquitous heath monitoring. To accurately read out small bio-signals, the development of high-performance flexible front-end circuits is crucial. Oxide semiconductors are considered one of the most promising active channel materials for on-polymeric-foil electronics. In this article, a high-gain flexible complementary metal-oxide-semiconductor(CMOS) inverter with a beta ratio of 1, a desirable feature for device miniaturization, was demonstrated by monolithically integrating a top-gated n-type indium gallium zinc oxide (IGZO) thin-film transistor (TFT) and a bottom-gated p-type SnO TFT on a 5.5-mu m-thick polyimide substrate. The influence of atomic layer deposited (ALD)-HfO2 capping layer on the properties of oxide active channels has been analyzed. The flexible inverter exhibited a high static voltage gain of 370 VN and balanced noise margins (noise margin high of 4.8 V, noise margin low of 4.7 V) for a supply voltage of 10 V. In addition, the voltage transfer characteristics remained virtually unchanged when the device was subjected to an outward or an inward bending radius of 2.5 mm, indicating the complementary oxide-TFT-based inverter is practical for flexible electronics applications.