A nonvolatile semiconductor memory device in 6H-SiC for harsh environment applications

摘要

An electrically erasable programmable read-only memory (EEPROM) cell fabricated on a 6H-SiC substrate is reported. It is the first fully functional SiC EEPROM device. This device uses a generic double-polysilicon-gate configuration. It has been tested at both room temperature and elevated temperatures, up to 200/spl deg/C, to demonstrate full programmability. The threshold voltage shifts between programmed and erased states, at all tested temperatures, are larger than 4.5 V. In both states, the device functions satisfactorily as an n-type MOSFET. Charge retention time is more than 24 h at room temperature.