Silicon X-Ray Detector With Integrated Thin-Film Transistor for Biomedical Applications

摘要

A novel silicon X-ray detector with an integrated thin-film-transistor (TFT) readout circuit is presented. The device consists of a bulk-silicon photodiode and a TFT atop the photodiode. X-ray photons are absorbed and converted to electronic charges by the bulk-silicon photodiode and then read out via the modulation of the TFT drain–source current through an internal gate. Such a device is promising for low-energy X-ray or gamma-ray applications including protein crystallography and X-ray spectroscopy.