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I-Gate Body-Tied Silicon-on-Insulator MOSFETs With Improved High-Frequency Performance

机译:I-Gate体式绝缘体上硅MOSFET具有改进的高频性能

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摘要

A new body-tied (BT) (I-gate) silicon-on-insulator transistor with comparable $f_{T}$ and $f_{max}$ as those of floating-body transistors and comparable analog performance as those of T-gate BT transistors is demonstrated. The structure is fabricated without process modifications by selectively blocking silicide formation and source/drain implant in a foundry technology.
机译:一种新的体贴(BT)(I门)绝缘体上硅晶体管,其$ f_ {T} $和$ f_ {max} $与浮体晶体管相当,并且模拟性能与T-演示了栅极BT晶体管。通过在铸造技术中选择性地阻止硅化物的形成和源极/漏极注入,无需工艺修改即可制造该结构。

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