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Resonant Magnetic Field Sensor With Capacitive Driving and Electromagnetic Induction Sensing

机译:具有电容驱动和电磁感应功能的共振磁场传感器

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摘要

This letter presents a novel magnetic field sensor, which consists of a square extensional mode resonator with a planar induction coil. This sensor exploits the principle of electromagnetic induction to detect external magnetic field through the electromotive force in the induction coil, which is placed on top of the resonant plate. The proposed sensor employs capacitive driving and electromagnetic induction sensing approach to detect the external magnetic field. The capacitive driving method reduces the power dissipation, and the electromagnetic induction sensing approach makes it easy to measure the output signal with high precision. The operation principle and fabrication process as well as the characterization of the magnetic field sensor are presented. Experimental result shows that the device offers a sensitivity of 3 $muhbox{V/mT}$ at its resonant frequency $f_{0} = hbox{4.33} hbox{MHz}$ in air. In this letter, the vibrating characterization of the sensor is largely reduced due to air damping. Therefore, vacuum packaging is needed to enhance the performance of the magnetic field sensor.
机译:这封信提出了一种新颖的磁场传感器,该传感器由具有平面感应线圈的方形扩展模式谐振器组成。该传感器利用电磁感应原理通过位于感应板顶部的感应线圈中的电动势检测外部磁场。所提出的传感器采用电容驱动和电磁感应传感方法来检测外部磁场。电容性驱动方法可降低功耗,电磁感应检测方法可轻松实现高精度的输出信号测量。介绍了磁场传感器的工作原理,制造过程以及特性。实验结果表明,该器件在空中的共振频率$ f_ {0} = hbox {4.33} hbox {MHz} $时,灵敏度为3 $ muhbox {V / mT} $。在这封信中,由于空气阻尼,大大降低了传感器的振动特性。因此,需要真空包装以增强磁场传感器的性能。

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