Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors

摘要

The asymmetric resonance response in thermally actuated piezoresistive cantilever sensors causes a need for optimization, taking parasitic actuation–sensing effects into account. In this work, two compensation methods based on Wheatstone bridge (WB) input voltage ( VsubWB_in/sub ) adjustment and reference circuit involvement were developed and investigated to diminish those unwanted coupling influences. In the first approach, VsubWB_in/sub was increased, resulting in a higher current flowing through the WB piezoresistors as well as a temperature gradient reduction between the thermal actuator (heating resistor: HR) and the WB, which can consequently minimize the parasitic coupling. Nevertheless, increasing VsubWB_in/sub (e.g., from 1 to 3.3 V ) may also yield an unwanted increase in power consumption by more than 10 times. Therefore, a second compensation method was considered: i.e., a reference electronic circuit is integrated with the cantilever sensor. Here, an electronic reference circuit was developed, which mimics the frequency behavior of the parasitic coupling. By subtracting the output of this circuit from the output of the cantilever, the resonance response can thus be improved. Both simulated and measured data show optimized amplitude and phase characteristics around resonant frequencies of 190.17 and 202.32 kHz , respectively. With this phase optimization in place, a phase-locked-loop (PLL) based system can be used to track the resonant frequency in real time, even under changing conditions of temperature ( T ) and relative humidity (RH), respectively. Finally, it is expected to enhance the sensitivity of such piezoresistive electro-thermal cantilever sensors under loading with any target analytes (e.g., particulate matter, gas, and humidity).