微悬臂梁结构的谐振式MEMS黏度传感器

摘要

The mechanism of fluid viscosity measurement was studied using resonance method in this paper.Firstly,the fluid viscosity sensor chip with micro cantilever beam structure was designed and manufactured using MEMS ( Micro Electro Mechanical Systems) technology.The chip as vibration body was excited by electromagnetic force and tested by piezoresistive effect for the measurement of fluid viscosity.Then the encapsulation structure was designed.Also,the experimental system was set up to calibrate the sensor through testing 4 kinds of organic fluid viscosity under 20℃and 25℃at room environment.The experimental results show that the resonant MEMS viscosity sensor with micro cantilever beam structure has characteristics of quick response,high mini-aturization,and in-situ measurement.The measuring accuracy of the sensor is better than 8%,and it can meet the measurement de-mand of fluid viscosity in the engineering.%文中研究了谐振方法测量流体黏度的测量机理，采用MEMS工艺设计并加工了微悬臂梁结构的流体黏度传感器芯片，芯片作为振动体采用电磁激励和压阻检测的方法进行粘度测量。设计了封装结构并搭建了实验系统，在室温环境20℃和25℃2个温度点下进行了4种有机流体的黏度测量。实验结果表明，微悬臂梁结构的谐振式MEMS黏度传感器具有响应速度快、微型化程度高、易于实现在线流体测量等特点，黏度的测量精度优于8％，较好地满足了流体黏度的工程测量需求。