Crystallographic investigation of aluminium nitride thin films on stainless steel foil for highly efficient piezoelectric vibration energy harvesters

N. Moriwaki; L.V. Minh; R. Ohigashi; O. Shimada; H. Kitayoshi; H. Kuwano

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Crystallographic investigation of aluminium nitride thin films on stainless steel foil for highly efficient piezoelectric vibration energy harvesters

机译：用于高效压电振动能量收集器的不锈钢箔上氮化铝薄膜的晶体学研究

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Thisstudyreportspiezoelectricpropertiesandcrystallographicmicrostructuresofaluminiumnitride(AlN,wurtzitestructure)thinfilmson50μmthickstainlesssteelfoil.Thetransversepiezoelectriccoefficientd31fande31fof10pmthickAlNfilmswereestimatedas-1.42±0.08μm/Vand-0.48±0.03C/m2fromatipdisplacementofthepiezoelectriccantilevers.Dielectricconstants33wasmeasuredas10.5±1.0.Anelectronbeamdiffractionpatternbyahigh-resolutiontransmissionelectronmicroscopeandx-raydiffractionpatternshowedthatabundanceratiooftheorientationsuchas101,102and103ofAlNcrystalonstainlesssteelfoilsincreasedwithincreasingthickness...

机译：Thisstudyreportspiezoelectricpropertiesandcrystallographicmicrostructuresofaluminiumnitride（ALN，wurtzitestructure）thinfilmson50μmthickstainlesssteelfoil.Thetransversepiezoelectriccoefficientd31fande31fof10pmthickAlNfilmswereestimatedas-1.42±0.08μm/ V和-0.48±0.03C / m2fromatipdisplacementofthepiezoelectriccantilevers.Dielectricconstants33wasmeasuredas10.5±1.0.Anelectronbeamdiffractionpatternbyahigh-resolutiontransmissionelectronmicroscopeandx-raydiffractionpatternshowedthatabundanceratiooftheorientationsuchas <101>，<102>和<103> ofAlNcrystalonstainlesssteelfoilsincreasedwithincreasingthickness ...

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《Journal of Physics: Conference Series》 |2016年第1期|共页
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N. Moriwaki; L.V. Minh; R. Ohigashi; O. Shimada; H. Kitayoshi; H. Kuwano;
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Crystallographic investigation of aluminium nitride thin films on stainless steel foil for highly efficient piezoelectric vibration energy harvesters

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