Shoe-mounted vibration energy harvester of PZT piezoelectric thin films on metal foils

摘要

Thispaperdescribesshoe-mountedpiezoelectricvibrationenergyharvesters(PVEHs).ThePVEHswerefabricatedfromPb(ZrTi)O3(PZT)thinfilmswhichweredirectlydepositedontoPt/Ti-coatedstainlesssteelfoilbyrf-magnetronsputtering.WeexperimentallyandtheoreticallyevaluatedimpulseresponsesofthePVEHsbyapplyingasimpleimpulseinputontheenergyharvesters,typicaldampedfreevibrationbehaviourwasclearlyobserved,andtheoutputsignalwasingoodagreementwiththetheoreticalvalue.Wemeasuredtheoutputpowerbyapplyingtheimpulseinputwithanoptimalloadresistanceof33.9kΩ.Themaximumoutputpowerwasapproximately20μW,whichcorrespondwiththecalculatedvaluebasedontheoreticalequation.Fromtheseresults,thetheoreticalequationwederivedmightbehelpfulfordesignpurposesoftheshoe-mountedPVEHs...