MANUFACTURING METHOD OF A THIN FILM TYPE PZT GLIDE HEAD FOR HARD DISK FOR MINIMIZING VOLUME OR WEIGHT OF A PZT GLIDE HEAD BY REPLACING A PIEZOELECTRIC DEVICE OF AN EXISTING BULK TYPE WITH A THIN FILM TYPE PIEZOELECTRIC DEVICE

摘要

PURPOSE: A manufacturing method of a thin film type PZT glide head for hard disk is provided to minimize a slider by manufacturing the glide head by the thin film type PZT.;CONSTITUTION: A DLC(Diamond Like Carbone) deposition film for insulation is formed in an upper part of a substrate. An align key is formed in a rear part of the DLC deposition. A Cavity and Shallow are formed in the front part of the deposition in which the align key is formed. A material for piezoelectric device is coated on a rear part of the substrate. The electrode is formed through plating about PZT. The substrate is cut with a chip size. An HGA(Head Gimbal Assembly) is assembled.;COPYRIGHT KIPO 2013;[Reference numerals] (AA) DLC film for insulation; (BB) Forming Align key; (CC) Forming front cavity; (DD) Forming front shallow; (EE) Cutting back side of substrate; (FF) Applying PZT; (GG) Forming electrode through plating; (HH) Front(ABS side); (II) Cutting in chip size; (JJ) Back side PZT surface; (KK) HGA(head gimbal assembly) assembly