Manufacturing method of thin film type PZT glide head for hard disk

摘要

the invention for thin-film PZT glide head of the hard disk in the manufacturing method for such, in particular more specifically whereby the glide head for detecting a surface defect of the hard disk drive media made of a thin-film PZT, the miniaturization of the slider can be made as compared to conventional bulk, as well as its size can be applied to the Pico Size in Femto Size of compact and, by replacing the piezoelectric element of the conventional thin-film piezoelectric bulk to the device using a semiconductor process, a low flying height can be minimized with the weight, volume and specific gravity of the sensitivity, the lower portion of the formed PZT thin film sensor and the PZT thin film formed on the sensor by making the air bearing surface (ABS) to which a one-piece, it is possible to design a compact than conventional glass to separate the production of glide head of the Femto Size can be preempted as well as technically integrated through a semiconductor process, because of the economic value added may create, by making the glide head in a thin film, there is an effect that the size and weight can be reduced by the height of the glide head injury than with conventional bulk piezoelectric element. ;