In this paper, we report on 4.5µm piezoelectric Pb(Zr0.52Ti0.48)O3 (PZT) thick films deposited on flexible stainless steel (SS) foils with LaNiO3 (LNO) buffer layers using a ceramic powder/sol–gel solution modified composite method. The polycrystalline thick films show a hysteresis loop at an applied electric field of 900 kV cm−1 with remanent polarization and coercive electric field values of 27µC cm−2 and 85 kV cm−1, respectively. At 1 kHz, the dielectric constant is 653 and the dielectric loss is 0.052. The leakage current density of the film is lower than 1.55 × 10−5 Acm−2 over the range of 0 to ±150V. The conduction current shows ohmic behaviour at a low electric field and space-charge-limited current characteristics at a high electric field.
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机译:在本文中,我们报告了使用改良的陶瓷粉/溶胶-凝胶溶液,在具有LaNiO3(LNO)缓冲层的柔性不锈钢(SS)箔上沉积4.5µm压电Pb(Zr0.52Ti0.48)O3(PZT)厚膜的方法复合方法。多晶厚膜在施加的900 kV cm -1 sup>电场下具有磁滞回线,剩余极化强度和矫顽电场值为27µC cm -2 sup>和85 kV cm -1 sup>。在1 kHz时,介电常数为653,介电损耗为0.052。膜的泄漏电流密度在0至±150V的范围内低于1.55×10 -5 sup> Acm -2 sup>。传导电流在低电场下表现出欧姆特性,而在高电场下表现出空间电荷受限的电流特性。
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