Aluminum nitride piezoelectric thin film, manufacturing method thereof, and piezoelectric material and piezoelectric component and method of manufacturing aluminum nitride piezoelectric thin film

摘要

PROBLEM TO BE SOLVED: To provide an aluminum nitride piezoelectric thin film whose polarization direction has a nitrogen polarity (N polarity) and which is excellent in piezoelectric characteristics.SOLUTION: An aluminum nitride piezoelectric thin film contains germanium, and when the sum of concentrations of germanium and aluminum is 100 atom%, the concentration of germanium is within a range of 0.4 atom% or more and 20 atom% or less.SELECTED DRAWING: None