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Aluminum nitride piezoelectric thin film, piezoelectric material, piezoelectric component, and aluminum nitride piezoelectric thin film manufacturing method
Aluminum nitride piezoelectric thin film, piezoelectric material, piezoelectric component, and aluminum nitride piezoelectric thin film manufacturing method
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机译：氮化铝压电薄膜，压电材料，压电部件以及氮化铝压电薄膜的制造方法
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摘要
A germanium-containing aluminum nitride piezoelectric film and a method for manufacturing an aluminum nitride piezoelectric film in which a germanium-containing aluminum nitride piezoelectric film is grown on a substrate by sputtering.
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