Terahertz Metamaterial-Based Microbolometers Fabricated by Conventional MEMS

摘要

37 μm × 37 μm array of metamaterial-based microbolometers was designed and successfully fa-bricated by conventional MEMS technology. FTIR measurements reveal that the as-designed mi-crobolometers exhibit a high absorption of ~31.5% at 3.93 THz. In contrast, no response can be detected from those microbolometers without metamaterials. The experimental results have been confirmed by simulations.