Optimization of design and microfabrication of metamaterial-based absorber for terahertz microbolometer

摘要

The sensitivity of uncooled microbolometer detectors to terahertz radiation can be significantly improved by enhancing the platform absorption. This paper presents the various aspects of design and optimization of metamaterial based frequency selective terahertz absorber. It also briefly discusses the microfabrication of terahertz microbolometer focal plane array which was recently developed at INO.