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An Approach to Increase Density of Field-Effect Heterotransistors Framework Circuits NAND and AND

机译:一种提高场效应异质晶体管框架电路NAND和AND密度的方法

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We introduce an approach to increase density of field effect heterotransistors, which include into itself circuits NAND and AND. The approach based on manufacturing a specific configuration of a heterostructure. After the manufacturing, we consider doping of several areas of the heterostructure by diffusion or ion implantation. After the doping, we consider optimized annealing of dopants and generated radiation defects during ion implantation. We consider redistribution of dopant and radiation defects under influence of mismatch induced stress. Some comparison of calculated results with experimental one has been done.
机译:我们介绍了一种增加场效应异质晶体管密度的方法,该方法本身包括电路NAND和AND。该方法基于制造异质结构的特定配置。在制造之后,我们考虑通过扩散或离子注入对异质结构的几个区域进行掺杂。掺杂之后,我们考虑优化掺杂剂退火并在离子注入过程中产生辐射缺陷。我们考虑在失配引起的应力影响下掺杂物和辐射缺陷的重新分布。已将计算结果与实验结果进行了一些比较。

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