...
首页> 外文期刊>International Journal of Materials Science and Applications >Optoelectronic Properties of Improved GaN Semiconductor on Si(111) Using Growth Approaches And Different Interlayer’s
【24h】

Optoelectronic Properties of Improved GaN Semiconductor on Si(111) Using Growth Approaches And Different Interlayer’s

机译:使用生长方法和不同中间层在Si(111)上改进的GaN半导体的光电性能

获取原文
           

摘要

The crystalline quality of wider direct band gap semiconductor (3.4 eV) hexagonalGaN(h-GaN)epilayer grown on Si(111) is evaluated by using different growth approaches and interlayer’s. The investigations of GaNepilayer crystal quality for the template of converted porous GaN layer formed by novel nitridation process of thin (2 and 0.5μm) GaAs layer on Si(111) and on C+ ion implanted very thin SiC layer formed on Si(111) and grown ambient effect are made. Epilayer grown on thinner non-isoelectronic converted SiC templates is found to broaden its PL line width whereas epilayer grown on porously converted GaN layer fromed from iso- electronic GaAs (111) layer on Si(111) is found narrow line width. H2 ambient grown film better crystalline quality and higher PL Ex. peak energy is found as compared to N2 ambient grown film. Low temperature PL measurement, similarity between defect related donor-acceptor peaks (DAP) to defect related yellow band luminescence at the room temperature PL measurement is also found. Grown epilayer different characterization reveals better crystalline quality h-GaN is achieved by using thin iso-electronic GaAS interlayer on Si(111) with H2 grown ambient.
机译:通过使用不同的生长方法和中间层,评估了在Si(111)上生长的更宽的直接带隙半导体(3.4 eV)六角形GaN(h-GaN)外延层的晶体质量。通过对Si(111)和C +离子上的薄(2和0.5μm)GaAs层进行新的氮化工艺形成的转化多孔GaN层模板的GaNepilayer晶体质量的研究,该薄层注入在Si(111)和C上形成的非常薄的SiC层产生了增加的环境效果。发现在较薄的非等电子转换的SiC模板上生长的外延层加宽了其PL线宽,而在Si(111)上的等电子GaAs(111)层上的多孔转换的GaN层上生长的外延层的线宽较窄。 H2环境生长膜具有更好的结晶质量和更高的PL Ex。与N2周围生长的薄膜相比,发现峰值能量。在室温PL测量下,还发现了低温PL测量,缺陷相关的供体-受体峰(DAP)与缺陷相关的黄带发光之间的相似性。生长的外延层的不同特征揭示了更好的晶体质量h-GaN是通过在Si(111)上使用薄的等电GaAs中间层在H2生长的环境下实现的。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号