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Optoelectronic properties of improved GaN semiconductor on Si (111) using growth approaches and different interlayer's

机译:使用生长方法和不同的中间层在Si(111)上改进的GaN半导体的光电性能

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摘要

The crystalline quality of wider direct band gap semiconductor (3.4 eV) h-GaN epilayer grown on Si (111) is evaluated by different growth approaches and by using different interlayer's. The investigations of GaN epilayer crystal quality for the template of converted porous GaN layer formed by novel nitridation process of thin (2 and 0.5 (μm) GaAs layer on Si (111) and on C+ ion implanted very thin SiC layer formed on Si (111) and grown ambient effect are made. Epilayer grown on thinner non-isoelectronic converted SiC templates is found to broaden its PL line width whereas epilayer grown on porously converted GaN layer framed from iso- electronic GaAs (111) layer on Si (111) is found narrow line width. H_2 ambient grown film better crystalline quality and higher PL Ex. peak energy is found as compared to N_2 ambient grown film. Low temperature PL measurement, similarity between defect related donor-acceptor peaks (DAP) to defect related yellow band luminescence at the room temperature PL measurement is also found. Grown epilayer different characterization reveals better crystalline quality h-GaN is achieved by using thin iso-electronic GaAS interlayer on Si (111) with H_2 grown ambient.
机译:通过不同的生长方法和使用不同的中间层来评估在Si(111)上生长的更宽的直接带隙半导体(3.4 eV)h-GaN外延层的晶体质量。通过在Si(111)和C +离子注入的非常薄的SiC层上形成的(2和0.5(μm)GaAs薄层的新颖氮化工艺形成的新型氮化工艺形成的转化多孔GaN层模板的GaN外延层晶体质量的研究发现在较薄的非等电转换SiC模板上生长的外延层会扩大其PL线宽,而在由Si(111)上的等电GaAs(111)层构成的多孔转换GaN层上生长的外延层则更宽。 H_2周围生长的薄膜具有更好的晶体质量和更高的PL Ex。峰值能量比N_2周围生长的薄膜更低的PL测量值,缺陷相关的供体-受体峰(DAP)与缺陷相关的黄带之间的相似性生长的外延层的不同表征显示出更好的晶体质量h-GaN是通过在Si(111)上使用薄的等电GaAs夹层实现的。 H_2生长环境。

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