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Mathematical analysis of nonlinear differential equation arising in MEMS

机译:MEMS中非线性微分方程的数学分析

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In this paper, we study nonlinear equation arising in MEMS modeling electrostatic actuation. We will prove the local and global existence of solutions of the generalized parabolic MEMS equation. We present that there exists a constant $lambda^{*}$ such that the associated stationary problem has a solution for any $lambda lambda^{*}$. We show that when $lambda 1$, as a function of $p$, the pull-in voltage $lambda^{*}(p)$ is strictly decreasing with respect to $1p_0$.
机译:在本文中,我们研究了在MEMS静电驱动建模中产生的非线性方程。我们将证明广义抛物线MEMS方程解的局部和全局存在。我们提出存在一个常量$ lambda ^ {*} $,这样相关的平稳问题就可以解决任何$ lambda lambda ^ {*} $的问题。我们表明,当$ lambda 1 $作为$ p $的函数时,吸合电压$ lambda ^ {*}(p)$相对于$ 1p_0 $严格降低。

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