A Designer's Guide to Subresolution Lithography: Enabling the Impossible to Get to the 14-nm Node [Tutorial]

Liebmann L.; Torres J.A.

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A Designer's Guide to Subresolution Lithography: Enabling the Impossible to Get to the 14-nm Node [Tutorial]

机译：次分辨率光刻设计者指南：使得不可能到达14纳米节点[教程]

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《Design & Test,IEEE》 |2013年第3期|70-92|共23页
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Liebmann L.; Torres J.A.;
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International Business Machines , Hopewell Junction,|c|;

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A Designer's Guide to Subresolution Lithography: Enabling the Impossible to Get to the 14-nm Node [Tutorial]

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