Computed force control system using functional link radial basis function network with asymmetric membership function for piezo-flexural nanopositioning stage

摘要

A computed force control system using functional link radial basis function network with asymmetric membership function (FLRBFN-AMF) for three-dimension motion control of a piezo-flexural nanopositioning stage (PFNS) is proposed in this study. First, the dynamics of the PFNS mechanism with the introduction of a lumped uncertainty including the equivalent hysteresis friction force are derived. Then, a computed force control system with an auxiliary control is proposed for the tracking of the reference contours with improved steady-state response. Since the dynamic characteristics of the PFNS are non-linear and time varying, a computed force control system using FLRBFN-AMF is designed to improve the control performance for the tracking of various reference trajectories, where the FLRBFN-AMF is employed to estimate a non-linear function including the lumped uncertainty of the PFNS. Moreover, by using the asymmetric membership function, the learning capability of the networks can be upgraded and the number of fuzzy rules can be optimised for the functional link radial basis function network. Furthermore, the adaptive learning algorithms for the training of the parameters of the FLRBFN-AMF online are derived using the Lyapunov stability theorem. Finally, some experimental results for the tracking of various reference contours of the PFNS are given to demonstrate the validity of the proposed control system.