High speed laser scanning microscopy by iterative learning control of a galvanometer scanner

摘要

Iterative learning control (ILC) for a galvanometer scanner is proposed to achieve high speed, linear, and accurate bidirectional scanning for scanning laser microscopy. A galvanometer scanner, as a low stiffness actuator, is first stabilized with a feedback control compensating for disturbances and nonlinearities at low frequencies, and ILC is applied for the control of the fast scanning motion. For stable inversion of the non-minimum phase zeros, a time delay approximation and a zero phase approximation are used for design of ILC, and their attainable bandwidths are analyzed. Experimental results verify the benefits of ILC of its wide control bandwidth, enabling a faster, more linear, and more accurate scanning without a phase lag and a gain mismatch. At the scan rate of 4112 lines per second, the root mean square (RMS) error of the ILC can be reduced by a factor of 73 in comparison with the feedback controlled galvanometer scanner of the commercial system.