Galvanometer mirror, galvanometer scanner using galvanometer mirror, laser processing machine using galvanometer mirror and manufacturing method of galvanometer mirror

摘要

The galvanometer mirror 10 has a mirror surface portion 10A having a mirror surface and a rear reinforcement portion 12 joined to the rear surface side of the mirror surface, the mirror surface portion 10A is made of a single crystal SiC wafer, and the rear surface The reinforcing part 12 is formed of a C/SiC material. As a result, the rigidity of the mirror surface portion is increased, the mirror surface portion is made thin, and the rear reinforcement portion of the mirror surface portion is reduced in weight. Thereby, even if it increases the resonance frequency of the galvanometer mirror and moves it at high speed, a galvanometer mirror which is hard to deform|transform with high precision is obtained.