MANUFACTURING METHOD FOR GALVANOMETER MIRROR AND GALVANOMETER MIRROR

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method for a galvanometer mirror where diversity in design specifications of a torsion bar is provided and each part of the torsion bar can be finished up accurately to the desired size.;SOLUTION: In the device, processes to form a mirror base board 1 of the galvanometer mirror A include a first etching process forming a part of each of a mirror forming part 11, a frame part 12 and the torsion bar part 13 by providing a multiple number of U-shape grooves with bottoms in places where each slit 10 on one surface of the base board is formed, a second etching process etching a part that is facing the multiple number of the U-shape grooves and a part facing one part of the torsion bar 13 in the direction of the thickness of the base board and a process to cover a bottom surface in the range sandwiching one part of the torsion bar part 13 among the multiple number of U-shape grooves with a protective part provided with corrosion resistance against the second etching process.;COPYRIGHT: (C)2002,JPO