Real-time high-speed motion blur compensation method using galvanometer mirror for shape sensing of microfabricated objects

摘要

In this paper, motion-blur compensation method for micro fabricated objects using a galvanometer mirror with back-and-forth rotation is proposed. Motion-blur compensation is expected to extend exposure time without motion blur because longer exposure time can decrease the intensity of illumination to avoid shape expansion of a target object by heat of illumination. Dealing with this demand, a galvanometer mirror is installed between the target and a 2D high-speed camera, and controls the optical axis of the camera to follow the moving target. Each continuous images are taken during the motion of the stage, and finally taken images are integrated into one image by patching for detecting fabrication error using image processing. The experimental system that consists of a high-speed camera, a galvanometer mirror and a high-precision stage is developed and a 20 mm/s moving drilled silicon nitride sheet having holes of about 40 μm in diameter are lattice-shaped at a pitch of 60 μm is captured without motion blur by using this system. Comparing captured images with still images in diameter, roundness and curvature of the each holes, the effectiveness of this system is validated.