High-repetition-rate optical delay line using a micromirror array and galvanometer mirror for a terahertz system

摘要

We developed a high-repetition-rate optical delay line based on a micromirror array andgalvanometer mirror for terahertz time-domain spectroscopy. The micromirror array is fabricated byusing the x-ray lithographic technology. The measurement of terahertz time-domain waveforms withthe new optical delay line is demonstrated successfully up to 25 Hz.