Iterative learning control (ILC) for a galvanometer scanner is proposed to achieve a high speed, linear, and accurate bidirectional scanning for scanning laser microscopy. Two stable inversion methods, zero phase shifts and phase fitting by input delays, are used for designing stable ILCs enabling a wide control bandwidth. Based on the measured Bode plot, models of a galvanometer scanner are obtained for each ILC. Experimental results verify the benefits of ILCs allowing a faster, more linear and accurate scanning without a phase lag and a gain mismatch and achieving up to a 73 times smaller root mean square (RMS) error than a conventional feedback controller. An imaging simulation based on the experimental data shows that the proposed ILCs provide an image with less distortion than the conventional feedback controller.
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