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Sub-nH Inductor Modeling and Design in 90-nm CMOS Technology for Millimeter-Wave Applications

机译:用于毫米波应用的90nm CMOS技术中的亚nH电感器建模和设计

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Inductor design is an important issue in millimeter-wave CMOS circuits. In these frequencies the required inductance is very small and hence special structure is required for inductors. The quality factor is the most important design parameter for these inductors, especially in CMOS process. To incorporate these inductors in circuit simulation, a simple lumped model is necessary. This work proposes a simple and accurate model, developed for design and optimization of such inductors. This model is based on quasi-transverse-electromagnetic-mode assumption. To increase the model accuracy we have separately modeled the short-end section of the inductor. Model parameters are calculated using reported analytic equations and some new empirical equations. Using this model we have designed and optimized a 250-pH inductor with different shield layers, for STMicroelectronics 90-nm digital CMOS process. The accuracy of the model parameters and the evaluation of the model has been carried out using 2-D and method-of-momentss electromagnetic solvers in Advanced Design System, with the substrate modeled using foundry design kit data.
机译:电感器设计是毫米波CMOS电路中的重要问题。在这些频率下,所需的电感非常小,因此电感器需要特殊的结构。品质因数是这些电感器最重要的设计参数,尤其是在CMOS工艺中。要将这些电感器纳入电路仿真中,需要一个简单的集总模型。这项工作提出了一个简单而准确的模型,该模型是为设计和优化此类电感器而开发的。该模型基于准横向电磁模式假设。为了提高模型精度,我们分别对电感器的短端部分进行了建模。使用报告的解析方程和一些新的经验方程计算模型参数。使用该模型,我们为STMicroelectronics的90纳米数字CMOS工艺设计并优化了具有不同屏蔽层的250-pH电感器。模型参数的准确性和模型的评估已在Advanced Design System中使用2-D和矩量法电磁求解器进行,而基板则使用铸造设计套件数据进行了建模。

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