IC design of driving circuit of MEMS microrobot using pulse-type hardware neuron model

摘要

This paper presented a driving circuit which can output a driving waveform of the piezoelectric element impact-type actuator. The piezoelectric element impact-type actuator generates the rotational movement which is necessary to move the legs of the micro electro mechanical systems (MEMS) microrobot. The MEMS microrobot is made from silicon wafers fabricated by micro fabrication technology. The size of the fabricated MEMS microrobot is 4.0 mm x 4.6 mm x 3.6 mm. The driving circuit consists of a bare chip IC of the pulse-type hardware neuron model (P-HNM) and a peripheral circuit. P-HNM is an electrical oscillating model which has the same basic features of biological neurons. Therefore, P-HNM can output the driving waveform of the piezoelectric element impact-type actuator using electrical oscillation as biological neuron. As a result, we showed that the driving circuit can output the driving waveform of the piezoelectric element impact-type actuator without using any software programs or analog digital converters.