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Metal concentration dependent mechanical properties of electrodeposited nickel incorporated diamond like carbon (Ni-DLC) thin films studied by nanoindentation

机译:通过纳米压痕研究电沉积镍结合类金刚石碳(Ni-DLC)薄膜的金属浓度依赖性机械性能

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Effect of nickel incorporation in diamond-like carbon (DLC) matrices has been investigated on the mechanical properties of Ni-DLC thin films by nanoindentation. DLC and Ni-DLC thin films of different nickel content were electrodeposited on ITO coated glass substrates at room temperature and low voltage. Raman spectrum analysis confirms the formation of the sp(2) and sp(3) phases of carbon in DLC and in some of Ni-DLC thin films. Microstructural studies by SEM reveal a variation in microstructures from finely granular to cluster like features with change in molar concentration of nickel in the electrolyte. GIXRD profiles demonstrate the presence of graphite, diamond and crystalline nickel phases in the thin films. EPMA study indicates the increase in nickel content in carbon matrix of prepared thin films with increase in nickel ions in the electrolyte. Depth controlled mode of nanoindentations was performed on the films to investigate their mechanical properties like hardness, elastic modulus, stiffness and elasto-plastic properties of the thin films. Nickel concentration dependent bilayer nature of heterogeneous growth structure has been revealed through force-distance curves. A hard and strong adhesive layer of DLC is formed immediately above the ITO surface, over which a much softer less adhesive layer is produced. With the increase in nickel content, bottom layer grows in thickness by the expense of the top layer. Hence at very low nickel content, the effect of top soft layer dominates the mechanical properties of the films, while at high nickel content gradually the effect of the soft layer vanishes. With increasing nickel content hardness of the films also shows an increasing trend contrary to the usual behavior of metal incorporated DLC thin films which may be due to multiple counter-interacting processes occurring simultaneously within the carbon matrix inducing changes in phase and hence in sp(2)/sp(3) hybridization ratio.
机译:已经通过纳米压痕研究了镍掺入类金刚石碳(DLC)基质中对镍-DLC薄膜力学性能的影响。在室温和低压下,将不同镍含量的DLC和Ni-DLC薄膜电沉积在ITO涂覆的玻璃基板上。拉曼光谱分析证实了DLC和某些Ni-DLC薄膜中碳的sp(2)和sp(3)相的形成。 SEM进行的微结构研究表明,随着电解质中镍摩尔浓度的变化,微结构从细颗粒到簇状特征也将发生变化。 GIXRD曲线表明薄膜中存在石墨,金刚石和结晶镍相。 EPMA研究表明,所制备薄膜的碳基质中镍含量随电解质中镍离子含量的增加而增加。在薄膜上进行深度控制的纳米压痕模式,以研究其机械性能,例如薄膜的硬度,弹性模量,刚度和弹塑性。通过力-距离曲线揭示了异质生长结构的镍浓度依赖性双层性质。刚好在ITO表面上方形成DLC硬而结实的粘合层,在该表面上会产生少得多的软粘合层。随着镍含量的增加,底层的厚度随着顶层的增加而增加。因此,在非常低的镍含量下,顶部软层的作用控制了薄膜的机械性能,而在很高的镍含量下,软层的作用逐渐消失。随着镍含量的增加,膜的硬度也显示出与掺入金属的DLC薄膜的通常行为相反的趋势,这可能是由于碳基质内同时发生多个反作用过程,从而引起了相变,从而引起了sp(2) )/ sp(3)杂交率。

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