DIAMOND-LIKE CARBON FILM-COATED PRODUCT, AND A DEVICE AND A METHOD FOR MANUFACTURING THE SAME TO PREVENT THE DETERIORATION OF MECHANICAL PROPERTY OF A DIAMOND-LIKE CARBON FILM

摘要

PURPOSE: A DLC(Diamond-Like Carbon) film-coated product, and a device and a method for manufacturing the same are provided to prevent the deterioration of mechanical property of a DLC film caused by compressive residual stress by applying bias voltage to a base material when forming the DLC film.;CONSTITUTION: A device for manufacturing a DLC film-coated product comprises a vacuum chamber which is injected with inactive gas, a graphite target and a base material which are arranged opposite to each other within the vacuum chamber, a magnetic field generating member which creates a magnetic field around the graphite target for increasing sputtering efficiency, a bias power supply which applies bias voltage to the base material, and a bias controller which controls the bias voltage in order to coat a DLC film(110) comprising a plurality of sub layers on the surface of the base material.;COPYRIGHT KIPO 2012