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Low-voltage operating solution-processed CdS thin-film transistor with Ca_2Nb_3O_(10) nanosheets deposited using Langmuir-Blodgett method for a gate insulator

机译:用Langmuir-Blodgett方法沉积Ca_2Nb_3O_(10)纳米片的低压操作溶液处理的CdS薄膜晶体管用于栅极绝缘体

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摘要

One of the most demanding challenges in next-generation thin-film transistors (TFTs) is the development of new materials for high-performance devices with higher speed and lower operation voltage. To drive a TFT at a low power, it is important to form an insulating layer as a thin film with good characteristics. Langmuir-Blodgett (LB) technique is one of the most suitable methods for controlling and developing two-dimensional nanomaterials. In the LB method, a layer only one molecule thick (Langmuir monolayer) is spread at the air/water interface and transferred onto the surface of a solid substrate and the process can be repeated several times with the same substrate to deposit multilayer films. In this study, a Ca2Nb3O10 (CNO) dielectric layer was fabricated using the LB method, and a CdS active layer was fabricated using the chemical bath deposition (CBD) method to obtain the final structure of CdS-TFTs. CNO dielectric layers have low leakage current density (7.26 x 10(-7)A cm(-2)) and a high capacitance density of 944 nF cm(-2) at 100 kHz. Therefore, it is considered that the CNO films produced using the LB method are suitable as an insulating layer material. Furthermore, the CdS-TFTs exhibited good performance with a low threshold voltage of 0.596 V, I-on/I-off current ratio of 10(6), subthreshold slope of 0.05 V dec(-1), and high mobility of 0.428 cm(2) V-1 S-1 at operating voltages less than 2 V.
机译:下一代薄膜晶体管(TFT)中最严峻的挑战之一是开发用于具有更高速度和更低工作电压的高性能器件的新材料。为了以低功率驱动TFT,重要的是将绝缘层形成为具有良好特性的薄膜。 Langmuir-Blodgett(LB)技术是控制和开发二维纳米材料的最合适方法之一。在LB法中,仅一个分子厚的层(Langmuir单层)在空气/水界面处扩散并转移到固体基材的表面上,并且该过程可以在相同的基材上重复几次以沉积多层膜。在这项研究中,使用LB方法制造了Ca2Nb3O10(CNO)介电层,并使用化学浴沉积(CBD)方法制造了CdS活性层以获得CdS-TFT的最终结构。 CNO介电层在100 kHz时具有低泄漏电流密度(7.26 x 10(-7)A cm(-2))和高电容密度944 nF cm(-2)。因此,认为使用LB法制造的CNO膜适合作为绝缘层材料。此外,CdS-TFT具有良好的性能,其低阈值电压为0.596 V,I-on / I-off电流比为10(6),亚阈值斜率为0.05 V dec(-1),高迁移率为0.428 cm (2)V-1 S-1,工作电压小于2V。

著录项

  • 来源
    《Applied Surface Science》 |2019年第15期|374-377|共4页
  • 作者单位

    Inst Adv Engn, Mat Sci & Chem Engn Ctr, 175-28,Goan Ro,51 Beon Gil, Yongin, Gyeonggi Do, South Korea|Korea Univ, Dept Mat Sci & Engn, Seoul, South Korea;

    Inst Adv Engn, Mat Sci & Chem Engn Ctr, 175-28,Goan Ro,51 Beon Gil, Yongin, Gyeonggi Do, South Korea;

    Hanbat Natl Univ, Dept Elect Engn, Daejeon, South Korea;

    Inst Adv Engn, Mat Sci & Chem Engn Ctr, 175-28,Goan Ro,51 Beon Gil, Yongin, Gyeonggi Do, South Korea;

    Korea Univ, Dept Mat Sci & Engn, Seoul, South Korea;

    Inst Adv Engn, Mat Sci & Chem Engn Ctr, 175-28,Goan Ro,51 Beon Gil, Yongin, Gyeonggi Do, South Korea;

    Inst Adv Engn, Mat Sci & Chem Engn Ctr, 175-28,Goan Ro,51 Beon Gil, Yongin, Gyeonggi Do, South Korea;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Thin-film transistor; Low-voltage operating; Ca2Nb3O10 nanosheets; CdS active layer;

    机译:薄膜晶体管;低压操作;Ca2Nb3O10纳米片;CdS活性层;

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