Preparation of palladium film by coating photolysis process using KrF or ArF excimer laser

摘要

The preparation of palladium (Pd) films has been investigated using KrF or ArF laser irradiation on a Pd acetate (PdAc) coated substrate. A crystalline Pd film could be obtained by KrF laser irradiation (fluence = 15-40 mJ/cm~2) but PdAc was found to remain in the film. An increase in the substrate temperature to 423 K decreased the inclusion of the unreacted precursor and produced a better crystallinity. An amorphous and uniform Pd film composed of very fine particles was found to be formed by this process under reduced pressure, which is probably due to the preferential ablation of the crystalline nuclei. ArF laser irradiation is more effective for decomposing the PdAc and for producing a Pd film with a better crystallinity and no (or smaller) organic inclusion.