机译:射频磁控溅射沉积用于透明导电电极的Ni,Ag和Pt基Al掺杂的ZnO双层薄膜
Department of Physics, Xiamen University, Xiamen 361005, PR China;
rnDepartment of Physics, Xiamen University, Xiamen 361005, PR China;
rnDepartment of Physics, Xiamen University, Xiamen 361005, PR China;
rnDepartment of Physics, Zhejiang Ocean University, No. 105, Wenhua Road, Zhoushan 316000, PR China;
Al-doped ZnO; double layer; transparent conductive oxide; magnetron sputtering;
机译:反应性高功率脉冲磁控溅射在室温下沉积均匀,高透明且导电的Al掺杂ZnO薄膜
机译:沉积温度对脉冲直流磁控溅射制备的薄膜太阳能电池透明电极Al掺杂ZnO薄膜性能的影响
机译:通过各种类型的磁控溅射沉积制备适合薄膜太阳能电池应用的Al掺杂ZnO透明电极
机译:磁控溅射研究导电透明Al掺杂ZnO /金属双层膜
机译:使用不平衡磁控溅射制造适用于薄膜晶体管的掺镓ZNO薄膜。
机译:射频直流和射频叠加直流磁控溅射沉积的透明导电掺铝ZnO多晶薄膜的载流子输运和晶体学取向特征
机译:通过反应高功率脉冲磁控溅射均匀,高度透明和导电Al掺杂ZnO膜的室温沉积