利用射频磁控溅射法在柔性衬底上制备ZnO∶Zr透明导电薄膜

摘要

Zirconium-doped zinc oxide (ZnO∶Zr) transparent conducting thin films with high transmittance, low resistivity and good adhesion were firstly prepared on water-cooled polyethylene glycol terephthalate flexible substrates by RF magnetron sputtering. X-ray diffraction and scanning electron microscopy show that the ZnO∶Zr films are polycrystalline with a hexagonal structure and a preferred orientation parallel to the substrate. The lowest resistivity obtained in our experiment is 1.55×10-3 Ω·cm. The average transmittance of the films is over 90% in the wavelength range of the visible spectrum.%利用射频磁控溅射法首次在室温水冷柔性衬底 PET上制备出了可见光透过率高、电阻率低的掺锆氧化锌(ZnO∶Zr)透明导电薄膜.X射线衍射和扫描电子显微镜表明,ZnO∶Zr薄膜为六角纤锌矿结构的多晶薄膜,且具有平行于衬底方向的择优取向.实验获得ZnO∶Zr薄膜的最小电阻率为1.55×10-3 Ω·cm.实验制备的ZnO∶Zr薄膜具有良好的附着性能,其可见光区平均透过率超过90%.