Preparation of Al-doped ZnO transparent electrodes suitable for thin-film solar cell applications by various types of magnetron sputtering depositions

摘要

In order to determine the influence of different types of magnetron sputtering (MS) depositions on the characteristics of Al-doped ZnO (AZO) thin films appropriate for applications as transparent electrodes in thin-film solar cells, transparent conducting AZO thin films were prepared on glass substrates at 200 ℃ by direct current (dc) magnetron sputtering (dc-MS), radio frequency (rf)-MS and rf power superimposed dc-MS (rf+dc-MS) depositions using an MS apparatus with the same AZO target. AZO thin films prepared by an rf + dc-MS deposition exhibited both a higher deposition rate than that found with rf-MS depositions and a lower resistivity or higher Hall mobility than those found with dc-MS. The lower dc sputter voltage featured in rf-MS and rf ± dc-MS depositions, producing smoother surface morphology and better crystallinity than obtained with dc-MS depositions. The light scattering characteristics of surface-textured AZO thin films prepared by various types of MS depositions were evaluated by observing the surface texture and measuring the optical transmittance and the diffusive component; wet-chemical etching of the thin film surface was performed in a 0.1 % HG solution. The obtainable haze property in the range from visible to near infrared in AZO films prepared by an rf + dc-MS deposition was markedly better than that obtained with dc-MS depositions.