Structural, optical and electrical properties of Cd-doped SnO_2 thin films grown by RF reactive magnetron co-sputtering

摘要

Transparent conducting SnO_2:Cd thin films were prepared by RF reactive magnetron co-sputtering on glass slides at a substrate temperature of 500 ℃ using CdO as cadmium source. The films were deposited under a mixed argon/oxygen atmosphere. The structural, optical and electrical properties were analyzed as a function of the Cd amount in the target. The X-ray diffraction shows that polycrystalline films were grown with both the tetragonal and orthorhombic phases of SnO_2. The obtained films have high transmit-tance and conductivity. The figure of merit of SnO_2 :Cd films are in the order of 10~(-3) Ω~(-1), which suggests that these films can be considered as candidates for transparent electrodes.