SNS Josephson Junction Series Arrays for the Josephson Arbitrary Waveform Synthesizer

摘要

The Josephson Arbitrary Waveform Synthesizer (JAWS) allows AC voltages to be generated with fundamental accuracy. Lumped arrays of Superconductor/Normal conductor/Superconductor (SNS) Josephson junctions were developed and investigated for this application. Combining electron-beam lithography and chemical-mechanical polishing, series arrays of sub-micrometer SNS junctions consisting of Nb/HfTi/Nb were fabricated. The junction size varied from 0.04 $mu{rm m}^{2}$ to 4 $mu{rm m}^{2}$ in series arrays up to 2560 junctions in different microwave designs. Stable Shapiro steps are generated in a frequency range from 5$~$GHz to 20 GHz using continuous microwave irradiation. Using a simple pulse pattern at different pulse repetition frequencies, the arrays show current-voltage characteristics with flat Shapiro steps. Sinusoidal AC voltages were synthesized using a commercial pulse pattern generator. Peak-to-zero voltages of some mV for frequencies below 1 kHz were achieved. Higher harmonics were measured to be more than 80 dB below the fundamental tone. The behavior of the arrays was investigated in more detail by measuring the amplitude-frequency spectra.