SNS-type Josephson junction element manufacturing method and SNS-type Josephson junction element manufacturing apparatus

摘要

The present invention provides a method for manufacturing an SNS-type Josephson junction device by radiating a beam on a laminate provided with a pair of superconducting films and with an insulating film disposed between the pair of superconducting films, the method being characterized in that the insulating film is formed of an insulating oxide of niobium, vanadium, titanium, or tantalum and in that the method is provided with: a beam radiation step for radiating the beam, composed of nonmetal ions, X-rays, or an electron beam, on the laminate from outside one of the superconducting films to convert part of the insulating oxide in the insulating film to an electroconductive oxide; and a beam adjustment step for measuring an electrical current or modulation voltage between the pair of superconducting films and adjusting the radiation of the beam on the basis of a measurement value resulting from the measurement.