Method for manufacturing SNS type Josephson junction element and apparatus for manufacturing SNS type Josephson junction element

摘要

Provided is a method for manufacturing a SNS Josephson junction by irradiating, with a beam, a laminate provided with a pair of superconducting films and an insulating film disposed between the pair of superconducting films, the method for manufacturing a SNS Josephson junction being characterized by the insulating film comprising Nb2O5 and by being provided with the following steps: a beam irradiation step in which the laminate is irradiated with the beam comprising a non-metallic ion, X-ray, or electron beam, from the outside of one of the superconducting films, and part of Nb2O5 in the insulating film is converted into NbOX (where X is 1 or 2); and a beam adjustment step in which the current or modulation voltage between the pair of superconducting films is measured and the beam irradiation is adjusted on the basis of the measurement value obtained from this measurement.