Secondary ion mass spectrometric studies of SrTiO_3 buffering effect on (Pb_(1-x)La_x)(Zr_(1-y)Ti_y)_(1-x/4)O_3 thin films prepared by pulsed laser deposition

摘要

Thin films of (Pb_(1-x)La_x)(Zr_(1-y)Ti_y)_(1-x/4)O_3 (5/70/30) were deposited in situ onto (100) Si, Pt/Ti/SiO_2/Si, and SrTiO_3/Si substrates by pulsed laser deposition from stoichiometric targets and subsequent annealing. Films grown on SrTiO_3/Si exhibited desired perovskite structure. On (100) Si and Pt/Ti/SiO_2/Si substrates, films exhibited a perovskite-pyrochlore mixed structure. Apparent Pb deficiency at the near-surface region was observed. Films deposited at different substrates showed variations in Si content. The buffering effect of SrTiO_3 was evidenced using x-ray diffraction and secondary ion mass spectrometry analyses.