Secondary ion mass spectrometric studies of SrTiO3 buffering effect on (Pb1-xLax)(Zr1-yTiy)1-x/4O3 thin films prepared by pulsed laser deposition

摘要

[[abstract]]Phase-pure perovskite (Pb1-xLax)(Zr1-yTiy)1-x/4O3 (PLZT) films were deposited in situ onto SrTiO3/Si substrate by pulsed laser deposition from stoichiometric targets. The PLZT films grown on (100) Si and Pt/Ti/SiO2/Si substrates showed a perovskite-pyrochlore mixed structure. Apparent Pb deficiency at the near-surface region was noted on PLZT films grown on all substrates employed in this work. This was accredited to the Pb loss occurred by volatilization of PbO at high temperature under low oxygen pressure environment. The buffering effect of SrTiO3 was established using XRD and SIMS analyses. The diffusion of Si atoms from the inner Si substrate to the outer PLZT film was assumed to be the cause for the broken down of PLZT films under electric stress.