A simple method for the preparation of transparent p-type Ca-doped CuInO2 films: Pulsed-laser deposition from air-sintered Ca-doped Cu2In2O5 targets

摘要

We report the deposition of single-phase undoped and Ca-doped CuInO2 thin films from a readily synthesized source target of Cu2In2O5-circumventing the very difficult fabrication of CuInO2 targets. X-ray diffraction shows that single-phase materials were obtained over a range of substrate temperatures and deposition pressures. p-type conductivities are measured to be similar to3x10(-3) S/cm, comparable to the best films previously reported. The optical properties of the films were measured by spectroscopic ellipsometry. (C) 2004 American Institute of Physics.