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Recovery from ultraviolet-induced threshold voltage shift in indium gallium zinc oxide thin film transistors by positive gate bias

机译:通过正栅偏压从紫外线诱导的铟镓锌氧化物薄膜晶体管的阈值电压偏移中恢复

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摘要

The effect of short-duration ultraviolet (UV) exposure on the threshold voltage (V_(th)) of amorphous indium gallium zinc oxide thin film transistors (TFTs) and its recovery characteristics were investigated. The V_(th) exhibited a significant negative shift after UV exposure. The V_(th) instability caused by UV illumination is attributed to the positive charge trapping in the dielectric layer and/or at the channel/dielectric interface. The illuminated devices showed a slow recovery in threshold voltage without external bias. However, an instant recovery can be achieved by the application of positive gate pulses, which is due to the elimination of the positive trapped charges as a result of the presence of a large amount of field-induced electrons in the interface region.
机译:研究了短时紫外线(UV)暴露对非晶铟镓锌氧化物薄膜晶体管(TFT)的阈值电压(V_(th))的影响及其恢复特性。紫外线暴露后,V_(th)表现出显着的负移。由紫外线照射引起的V_(th)不稳定性归因于在电介质层中和/或在沟道/电介质界面处捕获的正电荷。照明设备显示阈值电压恢复缓慢,没有外部偏置。但是,通过施加正门脉冲可以实现瞬时恢复,这是由于在界面区域中存在大量场感应电子而消除了正捕获电荷。

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  • 来源
    《Applied Physics Letters》 |2013年第20期|202110.1-202110.4|共4页
  • 作者单位

    School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore;

    School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore;

    School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore;

    School of Materials and Energy, Guangdong University of Technology, Guangzhou 510006, People's Republic of China;

    School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore;

    State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, Sichuan 610054, People's Republic of China;

    GLOBALFOUNDRIES Singapore Pte. Ltd., 60 Woodlands Industrial Park D Street 2, Singapore 738406;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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