机译:用于金属/氧化物/半导体器件的等离子体增强原子层沉积的WC_xN_y电极的功函数调整
Department of Materials Science and Engineering, Technion-Israel Institute of Technology, Haifa 32000, Israel;
Department of Materials Science and Engineering, Technion-Israel Institute of Technology, Haifa 32000, Israel;
Lam Research Corporation, 4000 N. First Street, San Jose, California 95134, USA;
Lam Research Corporation, 4000 N. First Street, San Jose, California 95134, USA;
Lam Research Corporation, 4000 N. First Street, San Jose, California 95134, USA;
Lam Research Corporation, 4000 N. First Street, San Jose, California 95134, USA;
Lam Research Corporation, 4000 N. First Street, San Jose, California 95134, USA;
Lam Research Corporation, 4000 N. First Street, San Jose, California 95134, USA;
Department of Materials Science and Engineering, Technion-Israel Institute of Technology, Haifa 32000, Israel;
机译:用于金属氧化物半导体器件的原子层沉积WC_xN_y电极的热稳定性
机译:多层石墨烯作为栅电极用于金属氧化物半导体场效应器件应用的功函数调整和改进的栅介电可靠性
机译:勘误表:“功函数调整和多层石墨烯作为栅电极用于金属氧化物半导体场效应器件的应用,提高了栅介电可靠性”物理来吧100,233506(2012)]
机译:具有原子层沉积的Al_2O_3栅极介电层的InAs沟道金属氧化物半导体HEMT
机译:具有可调功函数的双层金属栅电极:行为,机理和器件特性。
机译:氮化镓基金属氧化物半导体器件的表面制备和沉积的栅极氧化物
机译:高k GaAs金属绝缘体半导体电容器被非原位等离子体增强原子层沉积的AlN钝化以实现费米能级钉扎